top of page

Metrology products

We offer 2 main products for our customers - Measurement Utility and Measurement Suite and 2 support and development products - CAD2SEM and Profile2SEM

Each product has it's own specialization areas. 

EHAR Deep Structure Detector

Measurement Utility

(MU)

Critical Dimension Measurement Software

Measurement Suite

(MS)

Critical Dimension and Inspection Software

MS and MU could instantly upgrade measurement ability of your fleet to match for at least N+2 generation for OEM CDSEM tools.

Essentially the best way to archive closer matching between different CDSEM fleet tools is to use MU or MS. 

Defect Inspection

What Measurement Utility can do

  • Measurement Utility build around advanced CDSEM measurement flow based on Pattern recognition and Measurement vector transfer. The difference that all OEM manufacturers offer 1Layer-1PR-NMeas approach. We are offering NLayers-NPRs-NMeas scheme - means that you have multiple ways for recipe creation and gradual imporvements. 

  • Can operate on any OEM image formats (8 or 16 bit).

  • Extremely flexible for new algo incorporation - a new kind of measurement could be creates by adding new python code without recompilation.

  • Build for precision and accuracy for classic and advanced CDSEM measurements

  • Based on Labview and Python native connection.

  • Measurement Utility could be programmed to perform almost any required CDSEM measurement just by creating simple recipe by local technicians after 3 days  of training. 

  • Simple and transperent *.txt recipe format - customer could see any step performed for image measurement.

What Measurement Suite can do

​

  • Measurement Suite build for versatility and robustness for classic and advanced non standart CD and Inspection measurements.

  • New kind of measurement could be creates by adding new native VBAI/LabVIEW/Python code without recompilation

  • Can operate on any image formats (8/16/32 bits) including color imaging.

  • Embedded PR/Morphology/Texture/Golden comparison/Geometry and other VBAI modules.

  • Extremely fast execution with VBAI/LabVIEW modules      (ANCI C background) and Python modules (NumPy libraries).

  • Simple csv output, no native formats

  • High level of training required for integration of modules so offered product will include support for recipe creation.

  • Build for precision and accuracy for classic and advanced CDSEM measurements - focus on Inspection and Stochastic measurements.

​

Measurement Utilily Specifications

  • Images for Measurement: CDSEM/CROSSECTIONS/OPTICAL

  • Features for Measurement:      Line/Space/Contact/Pillar/Rotated/Striated/Pitch

  • Measurement output: CD/STD/PSD/Overlay/Resolution/SNR etc..

  • MultiLayer/MultiPattern/MultiMeasurement flow.

  • Ability to perform cross computation between layers/patterns measurements.

  • Natural support for SE/BSE detector signals

  • Support processing up to 5 different detectors for stable measurement.

  • Measurement Algorithms: Gray Level, Gradient

  • Image preprocessing: Linear, Adaptive, Kernels

  • Waveform Fitting :Gaussian, Wavelet, NN coders (patented)​.

  • Denoising: 

    • Classical with self convergence of parameters

    • AI Blind denoiser with Self supervision (patented).

    • AI pretrained denoisers

  • Addition features:

    • ​Edge extraction

    • EHAR slant for Deep structures (Contacts and Trenches)-patented

Measurement Suite Specifications

  • Images for Measurement: CDSEM/OPTICAL/TEM/STEM

  • Features for Measurement:  Per customer requirement

  • Measurement output: Per customer requirement

  • Ability to perform cross computation between any kind of  measurements.

  • Measurement Algorithms: Gray Level, Gradient, Projection Edge

  • Image preprocessing:  Best to fit customer specification

  • Waveform Fitting : Bear to fit customer specification.

  • Denoising:  Best to fit customer specification

  • ​Measurement Suite is the best suited for non trivial measurement which could be comprized as local measurements for  image sequence or require specific modelling - for example:

    • Heights and Slope trench measurement for dual angle collection of tilted SEM tool.​

    • Profile prediction from secondary electron responce.

    • Fine edge detection for EPE

    • Process simulation.

  • Recipe have the best know flow to satisfy customer requirement

bottom of page